Media Summary: I think we're on the path to the first real Asmus Hetzel of D2S describes the limitations of current Gaussian models and introduces Freeform Point Spread Function (FF ... Chinese sources revealed to Reuters that China has built a prototype of its own
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I think we're on the path to the first real Asmus Hetzel of D2S describes the limitations of current Gaussian models and introduces Freeform Point Spread Function (FF ... Chinese sources revealed to Reuters that China has built a prototype of its own Tom Cecil of Synopsys discusses the resurgence of inverse lithography Harry Levinson of HJL Lithography summarizes key developments at SPIE-PUV. Among these include updates on high-NA Tom Faure of GLOBALFOUNDRIES explains what's new and different with
Ezequiel Russell of Micron makes the case for adopting curvilinear masks to extend DUV multi-patterning, as well as help enable ... In Part 2 of a mask modeling series, Ryan Pearman of D2S reviews the challenges of mask modeling in the
