Media Summary: In this series of videos we're going to tune a resist parameter set we're going to Yellow fields can have formulas that refer to variables. Variables can take on multiple values. When variables with multiple values ... The line/space pattern is parameterized with two variables, 'pitch' and 'cd'. Simulated CD is plotted in different ways with respect ...
Hyperlith Tutorial 1 Getting Started - Detailed Analysis & Overview
In this series of videos we're going to tune a resist parameter set we're going to Yellow fields can have formulas that refer to variables. Variables can take on multiple values. When variables with multiple values ... The line/space pattern is parameterized with two variables, 'pitch' and 'cd'. Simulated CD is plotted in different ways with respect ... The Panoramic API (aka SOAPI/apiserver) is used to load an .hlin file, run the simulation and fetch the aerial image and resist ... The GDS-Multi-site mask pattern lets users choose multiple sites to simulate. Here we verify the optimal BARC thickness by looking at the resist profile. Minimizing the standing wave metric results in the best ...
You can write your own resist models in Python and use them as a plug-in to A 32nm line is simulated at five different pitches. At each pitch a bias is sought to cause the line to print at 32nm.
